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> 粒子計數(shù)器 LASA110II

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粒子計數(shù)器 LASA110II

粒子計數(shù)器 LASA110II
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     粒子計數(shù)器LASA110II型
簡單介紹
Lasa110II型是**款1.0 CFM流量的激光二極管粒子計數(shù)器,能夠監(jiān)測0.1μm粒子。這款計數(shù)器的功能非常**,監(jiān)測精準度極高,性能穩(wěn)定,使用成本低,使用壽命長,并帶有3年的激光部件保修。
產(chǎn)品描述

LASA110II 粒子計數(shù)器特點:

*          降低缺陷率

*          實時監(jiān)測導致制程缺陷的粒子變化

*          使用移動式計數(shù)器定位粒子污染源

*          排除多管采樣的常見漏計錯誤

*          附件配備齊全,適用于多種應用

*          0.1μm粒子監(jiān)測效率高于傳統(tǒng)設(shè)備

*          提高生產(chǎn)效率

*          存儲/導出采樣方案,節(jié)省潔凈室認證時間

*          通過辦公室電腦和網(wǎng)絡(luò)瀏覽器控制潔凈室監(jiān)測:設(shè)置、采樣、顯示、打印、下載數(shù)據(jù)、上傳采樣方案等

*          噪音極小,有利于改善工作環(huán)境

*          可選擇9種語言顯示和打印

*          符合ISOFS或英國標準的計算統(tǒng)計和報告

*          Facility Net軟件整合,用于**數(shù)據(jù)管理

*          高速下載數(shù)據(jù)至Excel、PDAUSB存儲器

*          成本低

*          使用同一臺粒子計數(shù)器進行ISO Class 1 - 9應用

*          無需頻繁清洗激光部件

*          泵的使用壽命長,無需每年更換葉片

*          容易清洗擦拭,設(shè)計有利于將粒子截留減至*少

*          符合ESA/ESD標準的KYDEX®機殼,非常結(jié)實,抗化學腐蝕。

*          低溫激光二級管使用壽命更長;激光部件保修3

LASA110II 粒子計數(shù)器應用:

*          潔凈室監(jiān)測,高靈敏度應用

*          滿足ISO、FS或英國標準的設(shè)施認證

*          微環(huán)境認證,故障診斷/移動式應用

*          多管采樣(使用AM II型多點采樣設(shè)備)

*          監(jiān)測高壓氣體(使用高壓擴散器)

*          超潔凈區(qū)監(jiān)測(ISO 1-2

LASA110II粒子計數(shù)器技術(shù)指標

Channel thresholds:

0.1, 0.2, 0.3, 0.5, 1.0, and 5.0 μm

Flow rate:

1 CFM (28.3 LPM); monitored and adjusted electronically

Calibration:

Materials traceable to US National Institute for Standards and Technology (NIST)

Test methodology:

0.1 μm particles verified by Differential Mobility Analysis; larger sizes verified by transmission electron microscopy

Maximum concentration:

@ 5% coincidence loss: > 500,000/ft3 (optional diluter required for ISO Class 8+); automatic over-coincidence alarm

Zero count level:

Exceeds JIS standards, allowing use in ISO class 1 and 2 rooms

Laser source:

Laser diode, 3W (de-rated to 2W), 810 nm, infrared

Laser cooling:

Thermoelectric chilling (Peltier cooler), heat sink, dedicated 5 CFM cooling fan

Warranty:

Three year warranty on laser module, two years on other components

Communication modes:

Ethernet or RS-232; optional 4-20 mA output board; optional USB output

Environmental sensors:

Optional Temp/RH probe; integrates up to 4 external sensors via 4-20 mA input

Display:

1/4 VGA color LCD screen

Display languages:

English, French, German, Italian, Japanese (Kanji), Korean, Spanish, Mandarin (classical or simplified)

Printer:

Built-in thermal printer

Reports:

Sample print strips; final reports for ISO/FS209/British Standards cleanroom qualification; averages

of multiple runs; print-on-alarm; sampling configuration printouts

Remote operation:

Use web browser to operate unit; save or load recipes

Key software features:

Recipes, scheduled sampling, historical data filtering, sorting and review, password protection

Data storage:

3,000 data sets (includes particle and environmental data, plus location, time, etc.)

Data and sampling security:

Stored data records cannot be altered; sampling recipes can be password protected

External surface:

KYDEX chassis, polyester display screen, and zinc-plated steel bottom are all ESA/ESD compliant

Cleaning materials:

Bleach, formaldehyde, ethyl/isopropyl alcohol, peroxide/quaternary ammonium solutions

Monitor cleanliness:

Internally filters both pump exhaust (99.99+% @ 0.1 μm) and cabinet exhaust (95.0% @ 0.3 μm)

Dimensions (l, w, h);

weight:

18 x 14 x 13 in. ( 45 x 35 x 32 cm);

37 lb. (17 kg)

Power:

85-264 V, 50-60 Hz; optional external battery/charger

Operating environment:

Temperature: 15 - 30°C; Humidity: 10 - 85% non-condensing

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