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Furnace Structure
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Double layer steel casing with air cooling.
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Two cooling fans inside to keep case temperature < 55oC.
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內(nèi)爐膛表面涂有美國進口的高溫氧化鋁涂層可以提高設(shè)備的加熱效率，同時也可以延長爐膛的使用壽命
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High purity Alumina refractory chamber
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Vacuum and gas mixing system is located in bottom Mobile cart with 4 wheel.
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Vacuum flange, gauge, valves, pipe and high vacuum pump are included for immediate use.
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Power
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6 Kw
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Voltage
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AC 208-240V Single Phase, 50/60 Hz
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Heating Element
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8 pcs1800oC grade MoSi2 heating element
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Max. Temperature
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1700 oC (< 1 hours )
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Continuous Temperature
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1600 oC
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Max. Heating Rate
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<= 5 oC /min
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Tube Size and Materials
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Premier Grade alumina tube made in USA.
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ID: 82 mm x OD: 73 mm x 1000 mm length.
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Two pairs of SS tune support is installed to avoid tube bending under high temperature (click picture below to see details).
 
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Heating Zone
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Temperature controllers
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One precision digital temperature controller programmable with 50 segments.
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PID adjustable with auto tune function to ensure temperature stability within +/- 1 oC. 控溫儀表操作視頻
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Full protection in each controller for over-temperature and broken thermal couple.
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Thermal Couple
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B type thermal couples built in
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Vacuum Flanges
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Two stainless steel flanges with vacuum hose and gas fitting pipe. One flange is installed with KFD-40 adaptor and ball valve.
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Double high temperature silicone O-ring for using under 300oC.
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Porous alumina blocks included for protecting flange from heat radiation.
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Vacuum pumps
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Tow stages vacuum pump installed in bottom case:
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OneDouble Steps Rotary Vane High Speed Mechanical Vacuum Pump- T2XZ-4C110with max. vacuum pressure of 10-2 torr.
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One turbo molecular pump with max. vacuum pressure of 2x10-5 torr.
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One precision vacuum sensor installed.
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Stainless steel hose tube is included for connecting to tube furnace.
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Digital vacuum meter / controller installed.
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Vacuum Sensor & display
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Vacuum sensor is installed to vacuum flange on tube furnace, and connect to a digital vacuum pressure display.
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Vacuum controller and display areinstalled in bottom mobile cart.
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Gas flow meter
User Manual(Click to download)
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9 precision mass flow meters (CS200) controllers are installed in bottom mobile cart with digital display panel of+/-1% of Full Scale (accuracy is within 35%-100% of full scale)
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3 MFC at range 0 - 1000scc
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3 MFC at range 0 - 200scc
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3 MFC at range 0 - 10 scc
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one floating meter will be installed for N2 gas only
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one mechanical pressure meters are installed in bottom mobile cart for monitor each gas 's pressure in mixer.
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9mass flow MFC control panels/displays with dial button to adjust gas flow rate. Please see picture below.
Software and interface (optional at extra cost). Please click uderline for software operation instruction
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Pipe connection, valves and gas mixer
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SS 316 1/4" pipe/fitting
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SS 316 vacuum needle valves
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21 sets of stainless steel vacuum valves are installed outside of right side panel of mobile cabinet to control, vacuum pump, flowing gases and two inlet gases separately.
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Please click here to see sketch of pipe connection.
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Dimension
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Furnace: 550 x 380 x 520 Bottom Mobile case: 600x600x597
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Net Weight
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about 100 kg
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Shipping weight
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200 Lbs
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Shipping package size after crating
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Two cases in one plastic pallet: 45x45x35/case
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Warranty & certificate
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One year limited warranty (Consumable parts such as processing tubes, o-rings and heating elements are not covered by the warranty, please order the replacement at related products below.)
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 CE Certificate
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