820G 系列----**壓力變送器/傳感器

特性...

標(biāo)準(zhǔn)托、千帕和毫帕真空范圍
寬補(bǔ)償工作溫度
誤接線保護(hù)

概況/設(shè)計(jì)原理:

820G系列傳感器具有**度高、低成本、**式傳感器，滿足真空應(yīng)用*苛刻的要求。全焊接結(jié)構(gòu)避免了其他設(shè)計(jì)中不同金屬部件之間的摩擦而引起的穩(wěn)定性問題。820G系列壓力計(jì)可提供不同真空壓力的類型，而可靠的設(shè)計(jì)保證產(chǎn)品在更廣溫度范圍內(nèi)的承壓能力.

工作原理:

820G系列壓力計(jì)具有一個(gè)Inconel ®隔膜和一個(gè)絕緣的電極，構(gòu)成了一個(gè)可變電容。當(dāng)壓力(真空)升高或降低時(shí)，電容隨之變化。該電容經(jīng)檢測后轉(zhuǎn)換為符合要求的線性電壓輸出信號.

典型應(yīng)用:

半導(dǎo)體制造
吸收冷卻器
激光
高壓**器
冷卻干燥
真空蒸餾

Specifications
Input
Pressure Range		0 to 1000 Torr or 0 to 100 kPa
Proof Pressure		See ordering chart
Burst Pressure		See ordering chart
Fatigue Life		>1 million cycles
Performance
Output		0-5 Vdc or 0-10 Vdc @6mA (3 wire)
Supply Voltage (Vs)		9-30 Vdc (14-30 Vdc for 10 Vdc output)
Long Term Drift		±0.5% FS/year
Accuracy		±0.5% RDG
Thermal Error Zero		±0.01% FS/°F (±0.018% FS/°C)
Thermal Error Span		±0.015% RDG/°F (±0.027% RDG/°C)
Compensated Temperature		32°F to +122°F (0°C to +50°C)
Operating Temperatures		-4°F to +176°F (-20°C to +80°C)
Storage Temperatures		-4°F to +185°F (-20°C to +85°C)
Zero Tolerance		.5% FS
Span Tolerance		.5% FS
Minimum Load Resistance		5000 ohms
Response Time		20 ms
Mechanical Configuration
Pressure Port		See ordering chart
Wetted Parts		Inconel® with Stainless Steel (4 T fitting- All Inconel)
Electrical Connection		9-Pin D-Sub
Enclosure		All Welded Stainless Steel
Shock		50g
Approvals		CE - 89/336/EEC for Heavy Industrial
Weight		5 oz